Search results for "blister formation"

Influence of MeV H+ ion beam flux on cross-linking and blister formation in PMMA resist

2012

In soft lithography, a pattern is produced in poly(dimethylsiloxane) (PDMS) elastomer by casting from a master mould. The mould can be made of poly(methylmethacrylate) (PMMA) resist by utilising either its positive or negative tone induced by an ion beam. Here we have investigated the irradiation conditions for achieving complete cross-linking and absence of blister formation in PMMA so that its negative characteristic can be used in making master moulds. PMMA thin films approximately 9 µm thick on Si were deposited by spin coating. The 2-MeV H+ ion beam was generated using a 1.7-MV tandem Tandetron accelerator. The beam was collimated to a 500×500 µm2 cross section using programmable proxi…